® Silicon Carbide Components","linkURL":"//www.hoyong.net/shop/%s/%s/c/supersicsiliconcarbidecomponents","keyTitle":"supersicsiliconcarbidecomponents","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"SUPERSiC® Silicon Carbide","linkURL":"//www.hoyong.net/shop/%s/%s/c/supersicsiliconcarbide","keyTitle":"supersicsiliconcarbide","pageTarget":"_self","children":[]}]}]},{"sequence":0,"linkText":"Specialty Gases","linkURL":"/en/home/products/specialty-gases.html","resourcePath":"/content/entegris-live/en/home/products/specialty-gases","keyTitle":"specialty-gases","pageTarget":"_self","children":[{"sequence":0,"linkText":"Specialty Gas Mixtures","linkURL":"//www.hoyong.net/shop/%s/%s/c/specialtygasmixtures","keyTitle":"specialtygasmixtures","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"Gas Delivery Cylinder Systems","linkURL":"//www.hoyong.net/shop/%s/%s/c/gasdeliverycylindersystems","keyTitle":"gasdeliverycylindersystems","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"Gas Delivery Cabinet Systems","linkURL":"//www.hoyong.net/shop/%s/%s/c/gasdeliverycabinetsystems","keyTitle":"gasdeliverycabinetsystems","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"Gases","linkURL":"//www.hoyong.net/shop/%s/%s/c/Gases","keyTitle":"Gases","pageTarget":"_self","children":[]}]},{"sequence":0,"linkText":"Wafer Handling","linkURL":"/en/home/products/wafer-handling.html","resourcePath":"/content/entegris-live/en/home/products/wafer-handling","keyTitle":"wafer-handling","pageTarget":"_self","children":[{"sequence":0,"linkText":"Wafer Processing","linkURL":"/en/home/products/wafer-handling/wafer-processing.html","resourcePath":"/content/entegris-live/en/home/products/wafer-handling/wafer-processing","keyTitle":"wafer-processing","pageTarget":"_self","children":[{"sequence":2,"linkText":"Post-CMP Cleaning Brushes","linkURL":"//www.hoyong.net/shop/%s/%s/c/postcmpcleaningbrushes","keyTitle":"postcmpcleaningbrushes","pageTarget":"_self","children":[]},{"sequence":3,"linkText":"300 mm Front Opening Unified Pods (FOUPs)","linkURL":"//www.hoyong.net/shop/%s/%s/c/300mmfrontopeningunifiedpodsfoups","keyTitle":"300mmfrontopeningunifiedpodsfoups","pageTarget":"_self","children":[]},{"sequence":4,"linkText":"200 mm Wafer Processing","linkURL":"//www.hoyong.net/shop/%s/%s/c/200mmwaferprocessing","keyTitle":"200mmwaferprocessing","pageTarget":"_self","children":[]},{"sequence":5,"linkText":"200 mm Accessories","linkURL":"//www.hoyong.net/shop/%s/%s/c/200mmaccessories","keyTitle":"200mmaccessories","pageTarget":"_self","children":[]},{"sequence":6,"linkText":"150 mm Wafer Processing","linkURL":"//www.hoyong.net/shop/%s/%s/c/150mmwaferprocessing","keyTitle":"150mmwaferprocessing","pageTarget":"_self","children":[]},{"sequence":7,"linkText":"150 mm and Smaller Wafer Carrier Accessories","linkURL":"//www.hoyong.net/shop/%s/%s/c/150mmandsmallerwafercarrieraccessories","keyTitle":"150mmandsmallerwafercarrieraccessories","pageTarget":"_self","children":[]},{"sequence":8,"linkText":"125 mm Wafer Processing","linkURL":"//www.hoyong.net/shop/%s/%s/c/125mmwaferprocessing","keyTitle":"125mmwaferprocessing","pageTarget":"_self","children":[]},{"sequence":9,"linkText":"100 mm Wafer Processing","linkURL":"//www.hoyong.net/shop/%s/%s/c/100mmwaferprocessing","keyTitle":"100mmwaferprocessing","pageTarget":"_self","children":[]},{"sequence":10,"linkText":"76.2 mm 3\" Wafer Processing","linkURL":"//www.hoyong.net/shop/%s/%s/c/762mm3inchwaferprocessing","keyTitle":"762mm3inchwaferprocessing","pageTarget":"_self","children":[]},{"sequence":11,"linkText":"2.5\" and Smaller Wafer Processing","linkURL":"//www.hoyong.net/shop/%s/%s/c/25inchandsmallerwaferprocessing","keyTitle":"25inchandsmallerwaferprocessing","pageTarget":"_self","children":[]},{"sequence":12,"linkText":"Labware","linkURL":"//www.hoyong.net/shop/%s/%s/c/labware","keyTitle":"labware","pageTarget":"_self","children":[]},{"sequence":13,"linkText":"Chucks","linkURL":"//www.hoyong.net/shop/%s/%s/c/echucks","keyTitle":"echucks","pageTarget":"_self","children":[]}]},{"sequence":0,"linkText":"Wafer Shipping","linkURL":"/en/home/products/wafer-handling/wafer-shipping.html","resourcePath":"/content/entegris-live/en/home/products/wafer-handling/wafer-shipping","keyTitle":"wafer-shipping","pageTarget":"_self","children":[{"sequence":0,"linkText":"300 mm Wafer Shippers","linkURL":"//www.hoyong.net/shop/%s/%s/c/300mmwafershippers","keyTitle":"300mmwafershippers","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"200 mm Wafer Shippers","linkURL":"//www.hoyong.net/shop/%s/%s/c/200mmwafershippers","keyTitle":"200mmwafershippers","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"150 mm Wafer Shippers","linkURL":"//www.hoyong.net/shop/%s/%s/c/150mmwafershippers","keyTitle":"150mmwafershippers","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"125 mm Wafer Shippers","linkURL":"//www.hoyong.net/shop/%s/%s/c/125mmwafershippers","keyTitle":"125mmwafershippers","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"100 mm Wafer Shippers","linkURL":"//www.hoyong.net/shop/%s/%s/c/100mmwafershippers","keyTitle":"100mmwafershippers","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"76.2 mm (3\") Wafer Shippers","linkURL":"//www.hoyong.net/shop/%s/%s/c/762mm3inchwafershippers","keyTitle":"762mm3inchwafershippers","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"2.5\" and Smaller Wafer Shippers","linkURL":"//www.hoyong.net/shop/%s/%s/c/25inchandsmallerwafershippers","keyTitle":"25inchandsmallerwafershippers","pageTarget":"_self","children":[]}]},{"sequence":0,"linkText":"Finished Wafer Shipping","linkURL":"/en/home/products/wafer-handling/finished-wafer-shipping.html","resourcePath":"/content/entegris-live/en/home/products/wafer-handling/finished-wafer-shipping","keyTitle":"finished-wafer-shipping","pageTarget":"_self","children":[{"sequence":1,"linkText":"SmartStack® Contactless Horizontal Wafer Shipper","linkURL":"//www.hoyong.net/shop/%s/%s/c/smartstackcontactlesshorizontalwafershippers","keyTitle":"smartstackcontactlesshorizontalwafershippers","pageTarget":"_self","children":[]},{"sequence":2,"linkText":"SmartStack® Horizontal Wafer Shippers","linkURL":"//www.hoyong.net/shop/%s/%s/c/smartstackhorizontalwafershippers","keyTitle":"smartstackhorizontalwafershippers","pageTarget":"_self","children":[]},{"sequence":3,"linkText":"Film Frame Rings and Shippers","linkURL":"//www.hoyong.net/shop/%s/%s/c/filmframeringsandshippers","keyTitle":"filmframeringsandshippers","pageTarget":"_self","children":[]}]}]}]},{"sequence":3,"linkText":"Resources","linkURL":"/en/home/resources.html","resourcePath":"/content/entegris-live/en/home/resources","keyTitle":"resources","pageTarget":"_self","children":[{"sequence":0,"linkText":"Reference Materials","linkURL":"/en/home/resources/reference-materials.html","resourcePath":"/content/entegris-live/en/home/resources/reference-materials","keyTitle":"reference-materials","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"Technical Information","linkURL":"/en/home/resources/technical-information.html","resourcePath":"/content/entegris-live/en/home/resources/technical-information","keyTitle":"technical-information","pageTarget":"_self","children":[{"sequence":0,"linkText":"Calculators and Tools","linkURL":"/en/home/resources/technical-information/calculators-and-tools.html","resourcePath":"/content/entegris-live/en/home/resources/technical-information/calculators-and-tools","keyTitle":"calculators-and-tools","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"Entegris Test Standards and Protocols","linkURL":"/en/home/resources/technical-information/entegristeststandardsandprotocols.html","resourcePath":"/content/entegris-live/en/home/resources/technical-information/entegristeststandardsandprotocols","keyTitle":"entegristeststandardsandprotocols","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"Formulas","linkURL":"/en/home/resources/technical-information/formulas.html","resourcePath":"/content/entegris-live/en/home/resources/technical-information/formulas","keyTitle":"formulas","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"Chemical Compatibility","linkURL":"/en/home/resources/technical-information/chemical-compatibility.html","resourcePath":"/content/entegris-live/en/home/resources/technical-information/chemical-compatibility","keyTitle":"chemical-compatibility","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"FAQ","linkURL":"/en/home/resources/technical-information/faq.html","resourcePath":"/content/entegris-live/en/home/resources/technical-information/faq","keyTitle":"faq","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"Material Properties and Safety","linkURL":"/en/home/resources/technical-information/material-propertiesandsafety.html","resourcePath":"/content/entegris-live/en/home/resources/technical-information/material-propertiesandsafety","keyTitle":"material-propertiesandsafety","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"Component Technical Information","linkURL":"/en/home/resources/technical-information/component-technicalinformation.html","resourcePath":"/content/entegris-live/en/home/resources/technical-information/component-technicalinformation","keyTitle":"component-technicalinformation","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"Particle Characterization Applications","linkURL":"/en/home/resources/technical-information/particle-characterization-applications.html","resourcePath":"/content/entegris-live/en/home/resources/technical-information/particle-characterization-applications","keyTitle":"particle-characterization-applications","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"Glossary","linkURL":"/en/home/resources/technical-information/glossary.html","resourcePath":"/content/entegris-live/en/home/resources/technical-information/glossary","keyTitle":"glossary","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"Chemlock® Filter Housing Technical Information","linkURL":"/en/home/resources/technical-information/chemlock-filter-housing-technical-information.html","resourcePath":"/content/entegris-live/en/home/resources/technical-information/chemlock-filter-housing-technical-information","keyTitle":"chemlock-filter-housing-technical-information","pageTarget":"_self","children":[]}]},{"sequence":0,"linkText":"Ensights (Blog)","linkURL":"/en/home/resources/ensights-blog.html","resourcePath":"/content/entegris-live/en/home/resources/ensights-blog","keyTitle":"ensights-blog","pageTarget":"_self","children":[]}]},{"sequence":4,"linkText":"About Us","linkURL":"/en/home/about-us.html","resourcePath":"/content/entegris-live/en/home/about-us","keyTitle":"about-us","pageTarget":"_self","children":[{"sequence":0,"linkText":"Corporate Overview","linkURL":"/en/home/about-us/corporate-overview.html","resourcePath":"/content/entegris-live/en/home/about-us/corporate-overview","keyTitle":"corporate-overview","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"Corporate Social Responsibility","linkURL":"/en/home/about-us/corporate-social-responsibility.html","resourcePath":"/content/entegris-live/en/home/about-us/corporate-social-responsibility","keyTitle":"corporate-social-responsibility","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"Careers","linkURL":"/en/home/about-us/careers.html","resourcePath":"/content/entegris-live/en/home/about-us/careers","keyTitle":"careers","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"Events","linkURL":"/en/home/about-us/events.html","resourcePath":"/content/entegris-live/en/home/about-us/events","keyTitle":"events","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"Investor Relations","linkURL":"/en/home/about-us/investor-relations.html","resourcePath":"/content/entegris-live/en/home/about-us/investor-relations","keyTitle":"investor-relations","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"Legal/Trademark Notices","linkURL":"/en/home/about-us/legal-trademark-notices.html","resourcePath":"/content/entegris-live/en/home/about-us/legal-trademark-notices","keyTitle":"legal-trademark-notices","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"Locations","linkURL":"/en/home/about-us/locations.html","resourcePath":"/content/entegris-live/en/home/about-us/locations","keyTitle":"locations","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"News","linkURL":"/en/home/about-us/news.html","resourcePath":"/content/entegris-live/en/home/about-us/news","keyTitle":"news","pageTarget":"_self","children":[]},{"sequence":0,"linkText":"Entegris Blog","linkURL":"/en/home/about-us/blogs.html","resourcePath":"/content/entegris-live/en/home/about-us/blogs","keyTitle":"blogs","pageTarget":"_self","children":[]}]}]">

特种材料


驱动器朝着更快,更密集和更便宜的持续不减。收缩装置尺寸和结构改变了对半导体处理的所有步骤中使用的材料的额外需求。由于设备缩放继续,污染和材料纯度比以往任何时候都变得更加重要,并且可以通过改变沉积和蚀刻工具涂覆的涂层来解决。整合沉积和蚀刻步骤的新化学物质也可以缓解垂直缩放挑战。

凭借我们先进的材料科学专业知识和帮助您解决最先进技术挑战的决心,我们准备帮助您保持前所未有的清洁水平。通过为您的应用提供精密工程的特种涂料和创新的前驱体和等离子体组合,我们可以实现高通量和高产量,以支持不断增长的设备存储需求。

96层及以上

96层及以外:3D NAND材料和集成挑战

在将3D NAND结构的数量增加到96层和超越时,数十年历史措施不再有效。


最近的网络研讨会

下一代CMP护发素解决CMP抛光挑战

在本次网络研讨会中,研发经理Doruk Yener博士将分享CMP护垫空调面临的挑战,以及量身定制的CMP护垫平台如何解决这些挑战并满足客户需求。

    注册查看网络研讨会

    有特色的网络研讨会

    用先进涂层保护等离子室零件和部件

    了解腔室零部件的高级涂料的重要性,并在此录制的网络研讨会中发现三种成功的涂料方法,与Connor Gallegos,产品经理和Nilesh Gunda,涂料产品技术。

      注册查看网络研讨会

      特色的见解

      3 d NAND闪存解决方案

      三维垂直堆叠内存架构在闪存存储中提供了指数级的收益,但它们也在器件制造和集成水平上引入了根本性的新挑战。我们了解这些挑战,并有理想的解决方案。

      96层及以上

      在将3D NAND结构的数量增加到96层和超越时,数十年历史措施不再有效。

      先进沉积材料创新

      随着半导体节点缩小到10纳米及以下,一度平坦的结构演变为复杂的3D结构,必须开发全新的材料沉积模式。integris采用全面的方法,先进的材料开发,产生行业领先的创新。

      用创新材料解决先进的技术挑战

      由于半导体节点收缩至10nm,并且需要提高材料和工艺集成。为了提供行业领先的创新,Entegris在制定化学品,CMP垫护发素和刷子的开发中使用整体方法。

      低温沉积用硅前驱体工具箱

      为给定的应用选择最合适的前驱体和等离子体组合的工具箱方法使工艺开发更有效率,有利于半导体器件制造商和他们的客户。

      卓越运营

      了解更多关于integris卓越的运营和我们对材料纯度和预防缺陷的关注,我们对安全和环境标准的技术坚持,如SDS®气瓶,气柜和输送系统,以及我们的本地供应能力。

      先进的涂料

      先进节点的半导体加工需要极高的洁净度,以最大限度地降低亚微观污染物带来的良率损失风险。在Entegris,我们了解这些挑战,并提供精密工程涂层,以延长工具寿命,同时提高设备成品率。

      碳化硅浆料

      趋势对电力集成电路(IC)制造商的压力施加压力,使用设计用于承受高温高频操作环境的技术生产较高的芯片。答案的一部分位于从硅基材转换为碳化硅(SiC)和氮化镓(GaN)。了解解决SIC Slurry性能的解决方案,满足电力IC制造商的需求。

      对我们的特种材料解决方案感兴趣吗?

      对我们的特种材料解决方案感兴趣吗?

      需要更多详细信息或本地办公室信息?

      需要更多详细信息或本地办公室信息?